Preparation of nanostructured materials (UNIZAR Espagne)

Preparation of nanostructured materials (UNIZAR Espagne)Code de l'UE : HMCH382


Fabrication methods of nanostructured materials: top-down and bottom-up approaches.
Vacuum technology. PVD. CVD.
Liquid Phase Deposition.
Electrochemical deposition.
Optical lithography. Fabrication of MEMS/NEMS. Electron beam lithography. Ion beam lithography. Scanning probe lithography. Nanoimprint, micro-printing, step-and-flash lithography. Other lithography techniques.
Lab demonstrations


To get a general conception of the different techniques, physical and chemical, for the preparation of nanostructured materials.
To be able to correlate the unique properties of the raw material, the preparation technique and the final characteristics and properties of the obtained nanostructure.
To acquire the necessary skills to recognize the difficulties in the laboratory to fabricate nanostructured materials and to be able to develop strategies to solve these difficulties and choose the most convenient solution in each case.
Planning, design and implementation of experiments for fabrication of nanostructured materials, assesing the problems and difficulties for doing so.

Formation expérimentale :
Preparation of materials, tutored by teaching staff

Pré-requis recommandés

1st year Master EM3E or 1st year master with required knowledge in material science, chemical engineering, numerical simulation and separation science.

Volume horaire

  • CM : 30
  • TD : 15
  • TP : 15


1. Handbook of Microlithography, Micromachining And Microfabrication, Vols 1 Y 2. P. Rai-Choudhury. SPIE
2. Nano and Microelectromechanical Systems (NEMS and MEMS) And Molecular Machines. David A. LaVan et al. Materials Research Society.
3. Fundamentals of Microfabrication. Marc. J. Madou. CRC Press
4. Principles of Lithography. Harry J. Levinson. SPIE Press
5. Principles of Chemical Vapor Deposition. Daniel M. Dobkin And Michael K. Zuraw (Eds.). Kluwer Academic Publishers
6. Materials Science of Thin Films: Deposition & Structur. Milton Ohring. Academic Press

Diplômes intégrant cette UE

En bref

Crédits ECTS 6

Période de l'année

Langue d'enseignement



Contact(s) administratif(s)

Damien QUEMENER (damien.quemener @